SUBSTRATE TREATMENT DEVICE AND SUBSTRATE TREATMENT METHOD

This invention pertains to a substrate treatment technology for performing a prescribed substrate treatment on a substrate by supplying a treatment liquid to the substrate held by a rotating substrate holding unit, and collecting droplets of the treatment liquid flung out from the substrate during t...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	NEMOTO, Shuhei
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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