PIECEWISE FUNCTIONAL FITTING OF SUBSTRATE PROFILES FOR PROCESS LEARNING

A method includes receiving, by a processing device, data indicative of a plurality of measurements of a profile of a substrate. The method further includes separating the data into a plurality of sets of data, a first set of the plurality of sets associated with a first region of the profile, and a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BARAI, Samit, SUNDAR, Bharath Ram, SETHURAMAN, Anantha R, NURANI, Raman Krishnan
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS COMPUTING COUNTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PHYSICS SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!