LASER DEVICE, LASER SYSTEM, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

This laser device includes: a laser chamber connected to a gas circulation system that includes a confluence pipe in which exhaust gases discharged from a plurality of laser devices including a laser device are combined, and that selects one of a new gas containing xenon and a circulating gas flowin...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	SUZUKI Natsushi
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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