IMPROVED SHOWERHEAD PUMPING GEOMETRY FOR PRECURSOR CONTAINMENT

Gas injector with a vacuum channel having an inlet opening in the front face and an outlet opening in the back face of the injector are described. The vacuum channel comprises a first leg extending a first length from the inlet opening in the front face at a first angle relative to the front face an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG, Chaowei, SUN, Lin, HOFFMANN, Eric J, BALUJA, Sanjeev, IYENGAR, Prahallad, GOLCHA, Janisht, AGARWAL, Ashutosh, TRINH, Cong, SHAH, Kartik, AUBUCHON, Joseph
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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