SUBSTRATE CARRIER
Die vorliegende Erfindung betrifft einen Substratträger zur Aufnahme und zum Transport mehrerer Substrate. The present invention relates to a substrate carrier for receiving and for transporting a plurality of substrates. La présente invention concerne un support de substrat destiné à recevoir et à...
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| creator | REISING, Michael KEMPF, Stefan NOVAK, Emmerich Manfred DIPPELL, Torsten HÜBNER, Simon ROHRMANN, Reiner |
| description | Die vorliegende Erfindung betrifft einen Substratträger zur Aufnahme und zum Transport mehrerer Substrate.
The present invention relates to a substrate carrier for receiving and for transporting a plurality of substrates.
La présente invention concerne un support de substrat destiné à recevoir et à transporter une pluralité de substrats. |
| format | Patent |
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The present invention relates to a substrate carrier for receiving and for transporting a plurality of substrates.
La présente invention concerne un support de substrat destiné à recevoir et à transporter une pluralité de substrats.</description><language>eng ; fre ; ger</language><subject>BASIC ELECTRIC ELEMENTS ; CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SEMICONDUCTOR DEVICES ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230105&DB=EPODOC&CC=WO&NR=2023274598A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230105&DB=EPODOC&CC=WO&NR=2023274598A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>REISING, Michael</creatorcontrib><creatorcontrib>KEMPF, Stefan</creatorcontrib><creatorcontrib>NOVAK, Emmerich Manfred</creatorcontrib><creatorcontrib>DIPPELL, Torsten</creatorcontrib><creatorcontrib>HÜBNER, Simon</creatorcontrib><creatorcontrib>ROHRMANN, Reiner</creatorcontrib><title>SUBSTRATE CARRIER</title><description>Die vorliegende Erfindung betrifft einen Substratträger zur Aufnahme und zum Transport mehrerer Substrate.
The present invention relates to a substrate carrier for receiving and for transporting a plurality of substrates.
La présente invention concerne un support de substrat destiné à recevoir et à transporter une pluralité de substrats.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBAMDnUKDglyDHFVcHYMCvJ0DeJhYE1LzClO5YXS3AzKbq4hzh66qQX58anFBYnJqXmpJfHh_kYGRsZG5iamlhaOhsbEqQIApCke4Q</recordid><startdate>20230105</startdate><enddate>20230105</enddate><creator>REISING, Michael</creator><creator>KEMPF, Stefan</creator><creator>NOVAK, Emmerich Manfred</creator><creator>DIPPELL, Torsten</creator><creator>HÜBNER, Simon</creator><creator>ROHRMANN, Reiner</creator><scope>EVB</scope></search><sort><creationdate>20230105</creationdate><title>SUBSTRATE CARRIER</title><author>REISING, Michael ; KEMPF, Stefan ; NOVAK, Emmerich Manfred ; DIPPELL, Torsten ; HÜBNER, Simon ; ROHRMANN, Reiner</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2023274598A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2023</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>REISING, Michael</creatorcontrib><creatorcontrib>KEMPF, Stefan</creatorcontrib><creatorcontrib>NOVAK, Emmerich Manfred</creatorcontrib><creatorcontrib>DIPPELL, Torsten</creatorcontrib><creatorcontrib>HÜBNER, Simon</creatorcontrib><creatorcontrib>ROHRMANN, Reiner</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>REISING, Michael</au><au>KEMPF, Stefan</au><au>NOVAK, Emmerich Manfred</au><au>DIPPELL, Torsten</au><au>HÜBNER, Simon</au><au>ROHRMANN, Reiner</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>SUBSTRATE CARRIER</title><date>2023-01-05</date><risdate>2023</risdate><abstract>Die vorliegende Erfindung betrifft einen Substratträger zur Aufnahme und zum Transport mehrerer Substrate.
The present invention relates to a substrate carrier for receiving and for transporting a plurality of substrates.
La présente invention concerne un support de substrat destiné à recevoir et à transporter une pluralité de substrats.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre ; ger |
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| subjects | BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | SUBSTRATE CARRIER |
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