HYBRID NEAR-FIELD SCANNING MICROWAVE MICROSCOPE

The invention describes a scanning probe imaging system with the probe held at a small distance from a sample (7) surface of the part during raster-scanning image acquisition. The interaction between the sample (7) and the probe's cantilever arm (17') is achieved due to microwave near fiel...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VYSHATKO, Nikolai, TSELEV, Alexander, SANTOS DA ROCHA CUPIDO, Luis Manuel
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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