TAB ARRANGEMENT FOR RETAINING SUPPORT ELEMENTS OF SUBSTRATE SUPPORT

Embodiments of substrate supports are provided herein, In some embodiments, a substrate support includes: a first plate having a plurality of openings extending into the first plate from an upper surface of the first plate to a bottom surface of each respective opening of the plurality of openings;...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHRIVASTAVA, Gaurav, YANG, Yao-Hung, RUHLAND, Fred Eric, HARAPANHALLI, Pavankumar Ramanand
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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