OPTICAL SENSOR FOR REMOTE TEMPERATURE MEASUREMENTS

Aspects of the present disclosure provide a sensor for remote temperature measurement. For example, the sensor can include a light source configured to form an illumination beam, focusing optics configured to direct the illumination beam from the light source onto a semiconductor sample at an illumi...

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Bibliographische Detailangaben
Hauptverfasser: MALEEV, Ivan, SUN, Yan, YAN, Zheng
Format: Patent
Sprache:eng ; fre
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