REAGENT CARTRIDGE FOR SUBLIMATION AND REACTOR APPARATUS

A reagent cartridge (1000) for sublimation of a solid reagent (1001) and a reactor apparatus are disclosed. The reagent cartridge (1000) comprises a reagent chamber (1200) for holding the solid reagent (1001) and at least one pressure sensor (1100) for measuring pressure inside the reagent cartridge...

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Bibliographische Detailangaben
Hauptverfasser:	GLAZEK, Wojciech, REYNAUD, Olivier, JUNTUNEN, Taneli
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS THEREOF DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	A reagent cartridge (1000) for sublimation of a solid reagent (1001) and a reactor apparatus are disclosed. The reagent cartridge (1000) comprises a reagent chamber (1200) for holding the solid reagent (1001) and at least one pressure sensor (1100) for measuring pressure inside the reagent cartridge (1000). L'invention concerne une cartouche de réactif (1000) pour la sublimation d'un réactif solide (1001) et un appareil de réacteur. La cartouche de réactif (1000) comprend une chambre de réactif (1200) pour contenir le réactif solide (1001) et au moins un capteur de pression (1100) pour mesurer la pression à l'intérieur de la cartouche de réactif (1000).