HIGH-SENSITIVITY HIGH-SPEED MICROBOLOMETER USING OPTICAL ANTENNA, AND METHOD FOR MANUFACTURING HIGH-SENSITIVITY HIGH-SPEED MICROBOLOMETER

Disclosed are a high-sensitivity high-speed microbolometer using an optical antenna and a method for manufacturing the high-sensitivity high-speed microbolometer. A high-sensitivity high-speed microbolometer using an optical antenna, according to one embodiment of the present invention, may comprise...

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Bibliographische Detailangaben
Hauptverfasser: KIM, Daisik, LEE, Dukhyung
Format: Patent
Sprache:eng ; fre ; kor
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