HIGH-SENSITIVITY HIGH-SPEED MICROBOLOMETER USING OPTICAL ANTENNA, AND METHOD FOR MANUFACTURING HIGH-SENSITIVITY HIGH-SPEED MICROBOLOMETER

Disclosed are a high-sensitivity high-speed microbolometer using an optical antenna and a method for manufacturing the high-sensitivity high-speed microbolometer. A high-sensitivity high-speed microbolometer using an optical antenna, according to one embodiment of the present invention, may comprise...

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Bibliographische Detailangaben
Hauptverfasser:	KIM, Daisik, LEE, Dukhyung
Format:	Patent
Sprache:	eng ; fre ; kor
Schlagworte:	COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING
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Beschreibung
Zusammenfassung:	Disclosed are a high-sensitivity high-speed microbolometer using an optical antenna and a method for manufacturing the high-sensitivity high-speed microbolometer. A high-sensitivity high-speed microbolometer using an optical antenna, according to one embodiment of the present invention, may comprise: a peripheral input/output circuit part which is disposed at the edge of a substrate pixel and reads a resistance value change of a thermistor; a connection part in which light absorbers are stacked on both sides of an arm and which is vertically connected to the peripheral input/output circuit part by means of a leg so as to float the light absorbers away from the substrate pixel; and an optical antenna which is disposed on a surface of the thermistor stacked on an upper surface of the arm. L'invention concerne un micro-bolomètre à grande vitesse à haute sensibilité utilisant une antenne optique et un procédé de fabrication du micro-bolomètre à grande vitesse à haute sensibilité. Un micro-bolomètre à grande vitesse à haute sensibilité utilisant une antenne optique, selon un mode de réalisation de la présente invention, peut comporter: une partie de circuit périphérique d'entrée/sortie qui est disposée au bord d'un pixel de substrat et lit un changement de valeur de résistance d'une thermistance; une partie de connexion dans laquelle des absorbeurs de lumière sont empilés des deux côtés d'un bras et qui est reliée verticalement à la partie de circuit périphérique d'entrée/sortie au moyen d'un pied de façon à faire flotter les absorbeurs de lumière à l'écart du pixel de substrat; et une antenne optique qui est disposée sur une surface de la thermistance empilée sur une surface supérieure du bras. 광학 안테나를 이용한 고감도 고속 마이크로볼로미터, 및 고감도 고속 마이크로볼로미터의 제작 방법이 개시된다. 본 발명의 일실시예에 따른, 광학 안테나를 이용한 고감도 고속 마이크로볼로미터는, 기판 픽셀의 가장자리에 배치되어 써미스터의 저항값 변화를 읽는 주변입출력회로부; 암(arm)의 양측면으로 광흡수체를 적층하고, 레그(leg)에 의해 상기 주변입출력회로부와 수직으로 연결되어 상기 광흡수체를 상기 기판 픽셀에서 띄워 놓는 연결부; 및 상기 암의 상면에 적층되는 상기 써미스터의 표면으로 배치되는 광학 안테나를 포함할 수 있다.