IMAGING SYSTEM AND IMAGING METHOD

The present invention improves throughput before observation of a lamella is completed, and also automatically makes corrections even when the lamella is greatly inclined. An imaging system 10 of the present disclosure comprises: a surface shape measurement device 3 which measures three-dimensional...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ITO Shuntaro, MISE Hiromi, KATSUTA Shuji
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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