PIXEL MATRIX SENSOR AND METHOD OF MANUFACTURING THE SAME

The invention relates to a method of preparing a pixel matrix sensor with a backside-illuminated geometry. After depositing (S12) a sensor layer on a second side of the substrate, a substrate spacer is prepared (S14), including removing completely the substrate in the central area from the second si...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NEUZNER, Andreas, STUTE, Andreas
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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