INSPECTION WITH PREVIOUS STEP SUBTRACTION

An inspection system may generate first-step images of multiple sample regions after a first process step and generate second-step images of the sample regions after a second process step, where the second process step modifies the sample in at least one of the sample regions. The system may further...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DANEN, Robert, SEZGINER, Abdurrahman, PARK, Sean, STARODUB, Dmitri
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CALCULATING COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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