INTERCONNECT LINE DEFECT DETECTION SYSTEM AND METHOD BASED ON PHASE LOCK SYNCHRONOUS IMAGE PROCESSING

The present invention relates to the technical field of infrared thermal imaging detection, and provides an interconnect line defect detection system and method based on phase lock synchronous image processing. The system comprises: a controller, used for sending a control signal to an excitation co...

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Bibliographische Detailangaben
Hauptverfasser: SU, Tao, WANG, Zixin, MOU, Bingrui, YANG, Ruijia, HU, Bingxiang
Format: Patent
Sprache:chi ; eng ; fre
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Zusammenfassung:The present invention relates to the technical field of infrared thermal imaging detection, and provides an interconnect line defect detection system and method based on phase lock synchronous image processing. The system comprises: a controller, used for sending a control signal to an excitation control module; an excitation power supply module, used for generating corresponding excitation current according to an excitation signal, the excitation power supply module being electrically connected to a power supply pin or a functional pin of an object to be detected; an image acquisition module, used for acquiring a thermal infrared image of periodic thermal waves generated by the object to be detected under the condition of current excitation; a processing module, used for analyzing and processing the acquired thermal infrared image to obtain a temperature signal of the object to be detected, performing phase lock related processing on the temperature signal by taking a temperature signal of a defect-free area