DEVICE DIAGNOSIS SYSTEM, DEVICE DIAGNOSIS DEVICE, SEMICONDUCTOR DEVICE PRODUCTION SYSTEM, AND DEVICE DIAGNOSIS METHOD

This device diagnosis system for diagnosing the state of a semiconductor production device comprises a device diagnosis device in which: sensor data collected from the semiconductor production device is used as input to output, from a first algorithm, a soundness index; the soundness index is used a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MATSUKURA Satoru, KAGOSHIMA Akira, NAGATANI Yuji, TAMARI Nanako, SUMIYA Masahiro
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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