NON-CONTACT OPTICAL METROLOGY SYSTEM TO MEASURE SIMULTANEOUSLY THE RELATIVE PISTON AND THE RELATIVE INCLINATION IN TWO AXES (TIP AND TILT) BETWEEN TWO REFLECTIVE SURFACES

The invention relates to a non-contact optical metrology system to measure simultaneously the relative piston and the relative inclination in two axes (tip and tilt) between two low curvature reflective surfaces using partially coherent light interferometry. The proposed system creates an interferen...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LARA SAEZ, Elena, SANQUIRCE GARCIA, Rubén, GONZALEZ JAIO, Maialen, ARASA MARTI, Josep, ROYO ROYO, Santiago, SANTOS VIVES, Pau, ROLDAN NARVION, Manuel Enrique, CASTRO LOPEZ-TARRUELLA, Francisco Javier, RODRIGO ARCAY, Noél, DIAZ CASTILLO, Alexander, PIZARRO BONDIA, Carles, MURGA LLANO, Gaizka
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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