ULTRA LOW LOSS SILICON NITRIDE BASED WAVEGUIDE

A method of making a waveguide includes providing a first portion of a cladding located over a substrate, forming a silicon nitride core over the first portion of the cladding using a deuterated silane source in a low-pressure chemical vapor deposition process, and forming a second portion of the cl...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MELNICHUK, Ann, KAMINENI, Vimal
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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