MULTI-ZONE COATINGS ON PARTS FOR GALLING PREVENTION AND HIGH-TEMPERATURE CHEMICAL STABILITY
Disclosed herein are fasteners for use in a semiconductor wafer process chamber. The fasteners may be used to secure hardware. The fasteners may include outermost surfaces that are provided by multiple different coatings, e.g., a hard coating and a dry lubricant coating. The hard coating may provide...
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| creator | ODE, Rohit GOMM, Troy Alan |
| description | Disclosed herein are fasteners for use in a semiconductor wafer process chamber. The fasteners may be used to secure hardware. The fasteners may include outermost surfaces that are provided by multiple different coatings, e.g., a hard coating and a dry lubricant coating. The hard coating may provide outermost surfaces of the fastener that are exposed to a plasma when a remote plasma clean is performed and may be used to prevent particle generation when the fastener is subjected to the remote plasma clean. The dry lubricant coating may provide outermost surfaces of a threaded portion of the fastener and may be used to prevent galling.
L'invention concerne des éléments de fixation destinés à être utilisés dans une chambre de traitement de tranche de semi-conducteur. Les éléments de fixation peuvent être utilisés pour fixer du matériel. Les éléments de fixation peuvent comprendre des surfaces les plus externes qui sont fournies par plusieurs revêtements différents, par exemple, un revêtement dur et un revêtement lubrifiant sec. Le revêtement dur peut fournir aux surfaces les plus externes de l'élément de fixation qui sont exposées à un plasma lorsqu'un nettoyage au plasma à distance est effectué et peut être utilisé pour empêcher la génération de particules lorsque l'élément de fixation est soumis au nettoyage au plasma à distance. Le revêtement lubrifiant sec peut fournir aux surfaces les plus à l'extérieur une partie filetée de l'élément de fixation et peut être utilisé pour empêcher des éraillures. |
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L'invention concerne des éléments de fixation destinés à être utilisés dans une chambre de traitement de tranche de semi-conducteur. Les éléments de fixation peuvent être utilisés pour fixer du matériel. Les éléments de fixation peuvent comprendre des surfaces les plus externes qui sont fournies par plusieurs revêtements différents, par exemple, un revêtement dur et un revêtement lubrifiant sec. Le revêtement dur peut fournir aux surfaces les plus externes de l'élément de fixation qui sont exposées à un plasma lorsqu'un nettoyage au plasma à distance est effectué et peut être utilisé pour empêcher la génération de particules lorsque l'élément de fixation est soumis au nettoyage au plasma à distance. Le revêtement lubrifiant sec peut fournir aux surfaces les plus à l'extérieur une partie filetée de l'élément de fixation et peut être utilisé pour empêcher des éraillures.</description><language>eng ; fre</language><subject>BASIC ELECTRIC ELEMENTS ; BLASTING ; CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS ORMACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS,CLIPS, WEDGES, JOINTS OR JOINTING ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; ENGINEERING ELEMENTS AND UNITS ; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS ; HEATING ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; LIGHTING ; MECHANICAL ENGINEERING ; METALLURGY ; SEMICONDUCTOR DEVICES ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION ; THERMAL INSULATION IN GENERAL ; WEAPONS</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230622&DB=EPODOC&CC=WO&NR=2023114318A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230622&DB=EPODOC&CC=WO&NR=2023114318A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>ODE, Rohit</creatorcontrib><creatorcontrib>GOMM, Troy Alan</creatorcontrib><title>MULTI-ZONE COATINGS ON PARTS FOR GALLING PREVENTION AND HIGH-TEMPERATURE CHEMICAL STABILITY</title><description>Disclosed herein are fasteners for use in a semiconductor wafer process chamber. The fasteners may be used to secure hardware. The fasteners may include outermost surfaces that are provided by multiple different coatings, e.g., a hard coating and a dry lubricant coating. The hard coating may provide outermost surfaces of the fastener that are exposed to a plasma when a remote plasma clean is performed and may be used to prevent particle generation when the fastener is subjected to the remote plasma clean. The dry lubricant coating may provide outermost surfaces of a threaded portion of the fastener and may be used to prevent galling.
L'invention concerne des éléments de fixation destinés à être utilisés dans une chambre de traitement de tranche de semi-conducteur. Les éléments de fixation peuvent être utilisés pour fixer du matériel. Les éléments de fixation peuvent comprendre des surfaces les plus externes qui sont fournies par plusieurs revêtements différents, par exemple, un revêtement dur et un revêtement lubrifiant sec. Le revêtement dur peut fournir aux surfaces les plus externes de l'élément de fixation qui sont exposées à un plasma lorsqu'un nettoyage au plasma à distance est effectué et peut être utilisé pour empêcher la génération de particules lorsque l'élément de fixation est soumis au nettoyage au plasma à distance. Le revêtement lubrifiant sec peut fournir aux surfaces les plus à l'extérieur une partie filetée de l'élément de fixation et peut être utilisé pour empêcher des éraillures.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>BLASTING</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS ORMACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS,CLIPS, WEDGES, JOINTS OR JOINTING</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>ENGINEERING ELEMENTS AND UNITS</subject><subject>GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS</subject><subject>HEATING</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>LIGHTING</subject><subject>MECHANICAL ENGINEERING</subject><subject>METALLURGY</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><subject>THERMAL INSULATION IN GENERAL</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNizEKwkAQRdNYiHqHAeuAm1jYjuskO7DZDZtJRC1CkLUSDcT7YwoPYPXhvfeXya1qrXB69Y5AexR2ZQPeQY1BGih8gBKtnSnUgTpywrNEdwLDpUmFqpoCShvmt6GKNVpoBI9sWS7rZPEYnlPc_HaVbAsSbdI4vvs4jcM9vuKnP_tsl-VK7XN1QJX_V30BZMgzHw</recordid><startdate>20230622</startdate><enddate>20230622</enddate><creator>ODE, Rohit</creator><creator>GOMM, Troy Alan</creator><scope>EVB</scope></search><sort><creationdate>20230622</creationdate><title>MULTI-ZONE COATINGS ON PARTS FOR GALLING PREVENTION AND HIGH-TEMPERATURE CHEMICAL STABILITY</title><author>ODE, Rohit ; GOMM, Troy Alan</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2023114318A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>2023</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>BLASTING</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS ORMACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS,CLIPS, WEDGES, JOINTS OR JOINTING</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>ENGINEERING ELEMENTS AND UNITS</topic><topic>GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS</topic><topic>HEATING</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>LIGHTING</topic><topic>MECHANICAL ENGINEERING</topic><topic>METALLURGY</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><topic>THERMAL INSULATION IN GENERAL</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>ODE, Rohit</creatorcontrib><creatorcontrib>GOMM, Troy Alan</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>ODE, Rohit</au><au>GOMM, Troy Alan</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MULTI-ZONE COATINGS ON PARTS FOR GALLING PREVENTION AND HIGH-TEMPERATURE CHEMICAL STABILITY</title><date>2023-06-22</date><risdate>2023</risdate><abstract>Disclosed herein are fasteners for use in a semiconductor wafer process chamber. The fasteners may be used to secure hardware. The fasteners may include outermost surfaces that are provided by multiple different coatings, e.g., a hard coating and a dry lubricant coating. The hard coating may provide outermost surfaces of the fastener that are exposed to a plasma when a remote plasma clean is performed and may be used to prevent particle generation when the fastener is subjected to the remote plasma clean. The dry lubricant coating may provide outermost surfaces of a threaded portion of the fastener and may be used to prevent galling.
L'invention concerne des éléments de fixation destinés à être utilisés dans une chambre de traitement de tranche de semi-conducteur. Les éléments de fixation peuvent être utilisés pour fixer du matériel. Les éléments de fixation peuvent comprendre des surfaces les plus externes qui sont fournies par plusieurs revêtements différents, par exemple, un revêtement dur et un revêtement lubrifiant sec. Le revêtement dur peut fournir aux surfaces les plus externes de l'élément de fixation qui sont exposées à un plasma lorsqu'un nettoyage au plasma à distance est effectué et peut être utilisé pour empêcher la génération de particules lorsque l'élément de fixation est soumis au nettoyage au plasma à distance. Le revêtement lubrifiant sec peut fournir aux surfaces les plus à l'extérieur une partie filetée de l'élément de fixation et peut être utilisé pour empêcher des éraillures.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS BLASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS ORMACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS,CLIPS, WEDGES, JOINTS OR JOINTING DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIGHTING MECHANICAL ENGINEERING METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THERMAL INSULATION IN GENERAL WEAPONS |
| title | MULTI-ZONE COATINGS ON PARTS FOR GALLING PREVENTION AND HIGH-TEMPERATURE CHEMICAL STABILITY |
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