APPARATUS AND METHOD FOR AVOIDING A DEGRADATION OF AN OPTICAL USED SURFACE OF A MIRROR MODULE, PROJECTION SYSTEM, ILLUMINATION SYSTEM AND PROJECTION EXPOSURE APPARATUS

Mirror module (100, 300, 400) for a projection exposure apparatus (200), comprising an optical used surface (104, 303, 403), an optical measurement surface (106, 305, 405, 405´), a measurement apparatus (113, 309, 409, 409´) for ascertaining the degradation state of the measurement surface, characte...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	STORM, Arnoldus Jan, KALLER, Julian, BECKER, Moritz
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MATERIALS THEREFOR MEASURING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	Mirror module (100, 300, 400) for a projection exposure apparatus (200), comprising an optical used surface (104, 303, 403), an optical measurement surface (106, 305, 405, 405´), a measurement apparatus (113, 309, 409, 409´) for ascertaining the degradation state of the measurement surface, characterized in that the mirror module (100) comprises a temperature control apparatus (108, 109) con- figured such that the temperature of the optical measurement surface (106, 305, 405, 405´) is lower than the temperature of the optical used surface (104, 303, 403). Module de miroir (100, 300, 400) d'un appareil d'exposition par projection (200), comprenant une surface utilisée optique (104, 303, 403), une surface de mesure optique (106, 305, 405, 405´), un appareil de mesure (113, 309, 409, 409´) permettant de déterminer l'état de dégradation de la surface de mesure, caractérisé en ce que le module de miroir (100) comprend un appareil de régulation de température (108, 109) configuré de telle sorte que la température de la surface de mesure optique (106, 305, 405, 405´) est inférieure à la température de la surface optique utilisée (104, 303, 403).