ECO-EFFICIENCY MONITORING AND EXPLORATION PLATFORM FOR SEMICONDUCTOR MANUFACTURING

Technologies directed to an eco-efficiency monitoring and exploration platform for semiconductor manufacturing. One method includes receiving, by a processing device, first data indicating an update to a substrate fabrication system having a first configuration of manufacturing equipment and operati...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MORADIAN, Ala, SHAH, Kartik B, MEIROVICH, Sergey, TREJO, Orlando, KHER, Shreyas Suresh, KELKAR, Umesh Madhav, NEVILLE, Elizabeth
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES
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