PLATFORM FOR CHARGED PARTICLE APPARATUS AND COMPONENTS WITHIN A CHARGED PARTICLE APPARATUS

Disclosed herein is a platform for a charged particle apparatus, the platform comprising: a base frame; a chamber arranged to comprise a substrate; a metrology frame arranged to support a charged particle beam generator for irradiating a substrate in the chamber with a charged particle beam; and a b...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	URBANUS, Willem Henk, HEMPENIUS, Peter, SANS MERCADER, Joan, SARS, Gerardus, GRASMAN, Jasper, BOSCH, Niels, PHILIPS, Patrick, BUTLER, Hans
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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