WAFER EDGE INSPECTION OF CHARGED PARTICLE INSPECTION SYSTEM

An improved method of wafer inspection is disclosed. The improved method includes a non- transitory computer-readable medium storing a set of instructions that are executable by at least one processor of a device to cause the device to perform a method comprising: placing the wafer at a location on...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JI, Xiaoyu, REN, Weiming, GONG, Zizhou
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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