DEPOSITION CHAMBER SYSTEM DIFFUSERS WITH EMBEDDED THERMOCOUPLE REGIONS

An apparatus includes a diffuser including a plurality of opening structures. Each opening structure of the plurality of opening structures includes a respective pinhole of a plurality of pinholes. The apparatus further includes a thermocouple line embedded within the diffuser. The thermocouple line...

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Bibliographische Detailangaben
Hauptverfasser:	SUNG, Won Ho, LEE, Sang Hoon, NEHRER, William, OH, Sang Jeong, KIM, Jong Yun
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE METALLURGY PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	An apparatus includes a diffuser including a plurality of opening structures. Each opening structure of the plurality of opening structures includes a respective pinhole of a plurality of pinholes. The apparatus further includes a thermocouple line embedded within the diffuser. The thermocouple line is disposed between a first pinhole of a first opening structure of the plurality of opening structures, and a second pinhole of a second opening structure of the plurality of opening structures. Un appareil comprend un diffuseur comprenant une pluralité de structures d'ouverture. Chaque structure d'ouverture de la pluralité de structures d'ouverture comprend un trou d'épingle respectif d'une pluralité de trous d'épingle. L'appareil comprend en outre une ligne de thermocouple intégrée à l'intérieur du diffuseur. La ligne de thermocouple est disposée entre un premier trou d'épingle d'une première structure d'ouverture de la pluralité de structures d'ouverture et un second trou d'épingle d'une seconde structure d'ouverture de la pluralité de structures d'ouverture.