SYSTEMS AND METHODS OF CREATING MULTIPLE ELECTRON BEAMS

An electron-beam device includes upper-column electron optics and lower-column electron optics. The upper-column electron optics include an aperture array to divide an electron beam into a plurality of electron beamlets. The upper-column electron optics also include a lens array with a plurality of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JIANG, Xinrong, SHRIYAN, Sameet K, CUMMINGS, Kevin, SEARS, Christopher, GRELLA, Luca
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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