DATA ACQUISITION METHOD, DEVICE, AND SYSTEM FOR SEMICONDUCTOR PROCESS EQUIPMENT
A data acquisition method, device, and system for semiconductor process equipment. The method comprises: receiving an activated data acquisition plan by means of a first communication interface (801); determining equipment data information required to be acquired by the data acquisition plan (802);...
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| Format: | Patent |
| Sprache: | chi ; eng ; fre |
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| Zusammenfassung: | A data acquisition method, device, and system for semiconductor process equipment. The method comprises: receiving an activated data acquisition plan by means of a first communication interface (801); determining equipment data information required to be acquired by the data acquisition plan (802); sending the equipment data information to the semiconductor process equipment by means of a second communication interface (803); and receiving equipment data, sent by the semiconductor process equipment, corresponding to the equipment data information, and forwarding the equipment data to an equipment control system by means of the first communication interface so as to display the equipment data (804).
L'invention concerne un procédé, un dispositif et un système d'acquisition de données pour équipement de traitement de semi-conducteurs. Le procédé consiste à : recevoir un plan d'acquisition de données activé au moyen d'une première interface de communication (801) ; déterminer des informations de données d'équipe |
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