POINT-OF-USE ULTRASONIC HOMOGENIZER FOR CMP SLURRY AGGLOMERATION REDUCTION

Exemplary slurry delivery assemblies may include a slurry fluid source. The assemblies may include a flurry delivery lumen having a lumen inlet and a lumen outlet. The lumen inlet may be fluidly coupled with an output of the slurry fluid source. The assemblies may include a deagglomeration tube flui...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHOU, Chih Chung, TANG, Jianshe, POLLARD, Chad, BROWN, Brian J, CHANG, Shou-Sung, SOUNDARARAJAN, Hari N, WU, Haosheng
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS FOR PERFORMING MECHANICAL WORK IN GENERAL GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
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