BLENDED ENERGY ION IMPLANTATION

Ion implantation systems and methods implant varying energies of an ion beam across a workpiece in a serial single-workpiece end station, where electrodes of an acceleration / deceleration stage, bend electrode and/or energy filter control a final energy or path of the ion beam to the workpiece. The...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GUPTA, Atul, ROH, Dwight, HERES, Patrick, DELUCA, James
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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