CONTROL METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS PRODUCTION LINE, DEVICE, AND STORAGE MEDIUM

The present disclosure provides a control method and apparatus for a semiconductor process production line, a device, and a storage medium. The control method for a semiconductor process production line is applied to a control device for a semiconductor process production line, and comprises: receiv...

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Bibliographische Detailangaben
Hauptverfasser: SU, Sheng-hua, HSIEH, Ming-hung, ZHU, Daofeng
Format: Patent
Sprache:chi ; eng ; fre
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Zusammenfassung:The present disclosure provides a control method and apparatus for a semiconductor process production line, a device, and a storage medium. The control method for a semiconductor process production line is applied to a control device for a semiconductor process production line, and comprises: receiving parameter information of a process station to be deleted; obtaining, according to the parameter information, an associated process station having an association relationship with the process station to be deleted, and associated data information; and if the associated process station and the associated data information are not updated, issuing first update prompt information. La présente invention concerne un procédé et un appareil de commande pour une ligne de production de processus à semi-conducteurs, un dispositif et un support de stockage. Le procédé de commande pour une ligne de production de processus à semi-conducteurs est appliqué à un dispositif de commande pour une ligne de production de processus à