NEGATIVE PHOTOSENSITIVE RESIN COMPOSITION, NEGATIVE PHOTOSENSITIVE POLMER, CURED FILM AND SEMICONDUCTOR DEVICE

A negative photosensitive resin composition according to the present invention contains (A) a polyimide; and the polyimide (A) comprises a structural unit (a1) represented by general formula (a1) and a structural unit (a2) represented by general formula (a2), while having a group represented by gene...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	IMAI Keita, OTOGURO Akihiko
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CHEMISTRY CINEMATOGRAPHY COMPOSITIONS BASED THEREON ELECTROGRAPHY HOLOGRAPHY MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS MATERIALS THEREFOR METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS THEIR PREPARATION OR CHEMICAL WORKING-UP
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A negative photosensitive resin composition according to the present invention contains (A) a polyimide; and the polyimide (A) comprises a structural unit (a1) represented by general formula (a1) and a structural unit (a2) represented by general formula (a2), while having a group represented by general formula (t) at least at one of both ends. Une composition de résine photosensible négative selon la présente invention contient (A) un polyimide ; et le polyimide (A) comprend une unité structurale (a1) représentée par la formule générale (a1) et une unité structurale (a2) représentée par la formule générale (a2), tout en ayant un groupe représenté par la formule générale (t) au moins à l'une des deux extrémités. 本発明のネガ型感光性樹脂組成物は、（Ａ）ポリイミドを含み、前記ポリイミド（Ａ）は、下記一般式（ａ１）で表される構造単位（ａ１）と、下記一般式（ａ２）で表される構造単位（ａ２）と、を含み、両末端の少なくとも一方が下記一般式（ｔ）で表される基である。