DEVICE AND METHOD FOR DISPENSING A GAS PHASE OF A SOLID PRECURSOR

The invention relates to a device for dispensing a gas phase of at least one solid precursor, said device comprising a container (1) intended to contain a solid phase (11) of said precursor, a first heating means (10) configured to heat at least one part of the container (1) and/or of the solid phas...

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Bibliographische Detailangaben
Hauptverfasser:	TODOROVA, Vanina, DULPHY, Hervé, LAURENT, Valere, PLAZA, Sonia
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention relates to a device for dispensing a gas phase of at least one solid precursor, said device comprising a container (1) intended to contain a solid phase (11) of said precursor, a first heating means (10) configured to heat at least one part of the container (1) and/or of the solid phase (11) so as to form a gas phase (12) of said precursor in the container (1), and dispensing means (13, 14) fluidically connected to the container (1) and configured to dispense the gas phase (12) from the container (1) to a point of use (60). According to the invention, the device comprises a chamber (2) which has an internal volume within which are the container (1) and said dispensing means (13, 14), said device also comprising a second heating means (20) configured to heat at least one part of the internal volume of the chamber (2). L'invention concerne un dispositif de distribution d'une phase gazeuse d'au moins un précurseur solide, ledit dispositif comprenant un récipient (1) destiné à contenir une phase solide (11) dudit précurseur, un premier moyen de chauffage (10) configuré pour chauffer au moins une partie du récipient (1) et/ou de la phase solide (11) de façon à former une phase gazeuse (12) dudit précurseur dans le récipient (1), des moyens de distribution (13, 14) reliés fluidiquement au récipient (1) et configurés pour distribuer la phase gazeuse (12) depuis le récipient (1) vers un point d'utilisation (60). Selon l'invention, le dispositif comprend une enceinte (2) ayant un volume interne dans lequel sont agencés le récipient (1) et lesdits moyens de distribution (13, 14), ledit dispositif comprenant en outre un deuxième moyen de chauffage (20) configuré pour chauffer au moins une partie du volume interne de l'enceinte (2).