METHOD FOR MANUFACTURING PIEZOELECTRIC FILM, METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT, AND METHOD FOR MANUFACTURING PIEZOELECTRIC DEVICE

This method for manufacturing a piezoelectric film includes a piezoelectric film formation step for forming a piezoelectric film, in which at least two types of crystal films are layered onto an amorphous film. The piezoelectric film formation step includes: a first crystal film formation step in wh...

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Bibliographische Detailangaben

Hauptverfasser:	ISHIKAWA, Taketo, NAKAMURA, Daisuke, TSUBURAOKA, Gaku, WATANABE, Masahiko, MACHINAGA, Hironobu, AOKI, Yuzuki
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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