MACHINE LEARNING FOR CLASSIFYING RETAINING RINGS

A method for optimizing polishing includes, for each respective retaining ring of a plurality of retaining rings mounted on a particular carrier head, performing measurements for a bottom surface of the respective retaining ring mounted on the particular carrier head using a coordinate measurement m...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LAU, Eric, ZHU, Zhize, NAGENGAST, Andrew J, ZHANG, Huanbo, GARRETSON, Charles C
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CALCULATING COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS COMPUTING COUNTING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS PHYSICS POLISHING TRANSPORTING
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