CHARGED PARTICLE BEAM APPARATUS, SCANNING ELECTRON MICROSCOPE, AND METHOD OF OPERATING A CHARGED PARTICLE BEAM APPARATUS

A charged particle beam apparatus (100) is described. The charged particle beam apparatus includes a first vacuum region (121) in which a charged particle beam emitter (105) for emitting a charged particle beam (102) along an optical axis (A) is arranged, a second vacuum region (122) downstream of t...

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Bibliographische Detailangaben

1. Verfasser:	ADAMEC, Pavel
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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