MINIATURE MICROWAVE CAVITY FOR ATOMIC CLOCK, AND MANUFACTURING METHOD

Disclosed in the present invention is a miniature microwave cavity for an atomic clock, comprising an atomic gas chamber and a substrate. A rectangular thin plate-shaped dielectric of the substrate has the bottom surface entirely plated with a metal coating, the middle of the top surface plated with a rectangular metal coating, and the periphery of the top surface plated with a hollow rectangular metal coating; the atomic gas chamber comprises a gas chamber base body; two side walls of the gas chamber base body are plated with spiral copper wires having the same spiral direction, to generate a static magnetic field perpendicular to the optical axis direction; a shielding cover has an open bottom surface to cover the hollow rectangular metal coating. Also disclosed is a manufacturing method for the miniature microwave cavity for an atomic clock. The microwave cavity in the present invention is simple in structure, the atomic gas chamber can be integrated on the silicon substrate by means of micro-electromechan