MONOLITHIC DETECTOR

A monolithic detector may be used in a charged particle beam apparatus. The detector may include a plurality of sensing elements (311) formed on a first side of a semiconductor substrate, each of the sensing elements configured to receive charged particles emitted from a sample and to generate carri...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OBERST, Matthias, NEUBAUER, Harald Gert Helmut, SCHWEIGER, Thomas
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MEASUREMENT OF NUCLEAR OR X-RADIATION MEASURING PHYSICS TESTING
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