SYSTEM FOR A SURFACE TREATMENT OF A SUBSTRATE WITH A FLUID

The present application relates to a system for a surface treatment of a substrate with a fluid and a method for a surface treatment of a substrate with a fluid. The system for a surface treatment of a substrate with a fluid comprises a substrate holder, a cover, and a treatment chamber. The substra...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TSCHINDERLE, Ulrich, ÖTZLINGER, Herbert, GLEISSNER, Andreas
Format: Patent
Sprache:eng ; fre
Schlagworte:
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