SUBSTRATE AUXILIARY COOLING SYSTEM FOR VACUUM EVAPORATION, AND WORKING METHOD

Disclosed are a substrate auxiliary cooling system for vacuum evaporation, and a working method. The system comprises a water cooling substrate arranged in an evaporation chamber as well as water inlets and water outlets formed on the water cooling substrate, through holes are formed on the water cooling substrate, one ends of connecting pipes on which a first valve is mounted are connected to the through holes, and the other ends of the connecting pipes are communicated with a liquid nitrogen storage device outside the chamber; the evaporation chamber is further connected to a molecular pump, the molecular pump is communicated with the evaporation chamber by means of a pipe, and a second valve is mounted on the pipe. An auxiliary cooling device is additionally provided on the basis of a conventional water cooling method, such that when conventional water cooling cannot satisfy the cooling requirement, a substrate is subjected to forced cooling, thereby improving the cooling efficiency and avoiding damage of