ELECTROSTATIC CHUCK PROVIDED WITH HEATING FUNCTION AND PREPARATION METHOD THEREFOR

An electrostatic chuck provided with a heating function and a preparation method therefor, which relate to the fields of semiconductors and material sciences. The electrostatic chuck comprises an upper ceramic base layer, an electrostatic chuck electrode layer, a middle ceramic layer, a heating elec...

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Bibliographische Detailangaben
1. Verfasser:	ZHANG, Juxian
Format:	Patent
Sprache:	chi ; eng ; fre
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY LIME, MAGNESIA METALLURGY REFRACTORIES SEMICONDUCTOR DEVICES SLAG TREATMENT OF NATURAL STONE
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