ELECTROSTATIC CHUCK PROVIDED WITH HEATING FUNCTION AND PREPARATION METHOD THEREFOR
An electrostatic chuck provided with a heating function and a preparation method therefor, which relate to the fields of semiconductors and material sciences. The electrostatic chuck comprises an upper ceramic base layer, an electrostatic chuck electrode layer, a middle ceramic layer, a heating elec...
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Format: | Patent |
Sprache: | chi ; eng ; fre |
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Zusammenfassung: | An electrostatic chuck provided with a heating function and a preparation method therefor, which relate to the fields of semiconductors and material sciences. The electrostatic chuck comprises an upper ceramic base layer, an electrostatic chuck electrode layer, a middle ceramic layer, a heating electrode layer, and a lower ceramic base layer, wherein the electrostatic chuck electrode layer is located between the upper ceramic base layer and the middle ceramic layer; the heating electrode layer is located between the middle ceramic layer and the lower ceramic base layer; the upper ceramic base layer, the middle ceramic layer, and the lower ceramic base layer are sintered to become an integral piece that substantially encapsulates the electrostatic chuck electrode layer and the heating electrode layer as a whole, and only reserves connection contacts used for providing electrical connections for the electrostatic chuck electrode layer and the heating electrode layer. The electrostatic chuck provided with a heat |
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