ELECTROSTATIC CHUCK ELECTRODE PATTERN STRUCTURE HAVING CONCENTRIC CIRCLE STRUCTURE

The present invention relates to the fields of semiconductors and materials science and provides an electrostatic chuck electrode pattern structure having a concentric circle structure. After electrode units in the electrostatic chuck are separated into a plurality of small electrode arcs, by means...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	ZHANG, Juxian
Format:	Patent
Sprache:	chi ; eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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