ELECTROSTATIC CHUCK ELECTRODE PATTERN STRUCTURE HAVING CONCENTRIC CIRCLE STRUCTURE

The present invention relates to the fields of semiconductors and materials science and provides an electrostatic chuck electrode pattern structure having a concentric circle structure. After electrode units in the electrostatic chuck are separated into a plurality of small electrode arcs, by means the configuration of connection points, electrodes in the entire electrostatic chuck may be divided into any number of electrodes required. Electrodes of the electrostatic chuck having this kind of structure allow for miniaturization in dividing units, which facilitates lowering residual thermal stress, and also, the occurrence of an isolated electrode during unit division is prevented. The electrostatic chuck electrodes have good symmetry and have a uniform and simple structure. La présente invention concerne les domaines des semi-conducteurs et des sciences des matériaux et fournit une structure de motif d'électrode de mandrin électrostatique ayant une structure en cercle concentrique. Après que les unités d'élec