METHOD OF OPERATION OF A CHARGED PARTICLE BEAM DEVICE

A method of operation of a charged particle beam device, where the observed place on a sample moves within the field of view of the charged particle beam device as the sample is tilted or rotated. At least one sample image in a first sample position and at least one auxiliary sample image in a posit...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	VOJTĚCH, Filip
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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