SUBSTRATE HOLDER REPLACEMENT WITH PROTECTIVE DISK DURING PASTING PROCESS

A shutter disc for use in a cluster tool assembly having a processing chamber and a transfer arm includes an inner disc and an outer disc configured to be disposed on the inner disc. The inner disc includes a plurality of locating features configured to mate with locating pins of a transfer arm of a...

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Bibliographische Detailangaben
Hauptverfasser:	BREZOCZKY, Thomas, YEDLA, Srinivasa Rao, PRASAD, Bhaskar, SATYAVOLU, Nitin Bharadwaj, SAVANDAIAH, Kirankumar Neelasandra
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A shutter disc for use in a cluster tool assembly having a processing chamber and a transfer arm includes an inner disc and an outer disc configured to be disposed on the inner disc. The inner disc includes a plurality of locating features configured to mate with locating pins of a transfer arm of a cluster tool assembly and a plurality of centering features configured to mate with alignment elements of a substrate support disposed in the processing chamber of the cluster tool assembly. L'invention concerne un disque obturateur, destiné à être utilisé dans un faisceau d'outils comportant une chambre de traitement et un bras de transfert, comprenant un disque interne et un disque externe, conçu pour être disposé sur le disque interne. Le disque interne comprend une pluralité d'éléments de positionnement, conçus pour s'accoupler avec des broches de positionnement d'un bras de transfert d'un faisceau d'outils et une pluralité d'éléments de centrage, conçus pour s'accoupler avec des éléments d'alignement d'un support de substrat disposé dans la chambre de traitement du faisceau d'outils.