MATERIAL ANALYSIS WITH MULTIPLE DETECTORS

A detector module for use in an apparatus for analysing a specimen is provided. The detector module comprises a plurality of X-ray sensor elements and one or more electron sensor elements, and is adapted to be positioned below a polepiece of an electron beam assembly of the apparatus from which an e...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BURGESS, Simon, TYRRELL, Chris, BHADARE, Santokh, STATHAM, Peter
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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