CLEANING SYSTEM FOR POLISHING LIQUID DELIVERY ARM

A polishing assembly includes a rotatable platen to support a polishing pad, a polishing liquid delivery arm having an enclosure open at a bottom thereof and one or more ports to deliver a polishing liquid and a cleaning fluid downwardly through an interior space of the enclosure onto the polishing...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	GADGIL, Shantanu Rajiv, NANGOY, Roy C, D'AMBRA, Allen L, DAVIS, Nathan Arron, PATANKAR, Sumit Subhash, COUGHLIN, Michael J
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	A polishing assembly includes a rotatable platen to support a polishing pad, a polishing liquid delivery arm having an enclosure open at a bottom thereof and one or more ports to deliver a polishing liquid and a cleaning fluid downwardly through an interior space of the enclosure onto the polishing pad, and a delivery arm cleaning tool removably attached to the polishing liquid delivery arm, the cleaning tool extending below the delivery arm and having a delivery arm-facing surface shaped such that the cleaning tool directs the cleaning fluid from the polishing liquid delivery arm on to a surface of the enclosure of the polishing liquid delivery arm. Ensemble de polissage comprenant un plateau rotatif visant à supporter un tampon de polissage, un bras de distribution de liquide de polissage ayant une enceinte ouverte au niveau d'un fond de celle-ci, un ou plusieurs orifices servant à distribuer un liquide de polissage et un fluide de nettoyage vers le bas à travers un espace intérieur de l'enceinte sur le tampon de polissage, et un outil de nettoyage de bras de distribution fixé de manière amovible au bras de distribution de liquide de polissage, l'outil de nettoyage s'étendant sous le bras de distribution et ayant une surface orientée vers le bras de distribution formée de telle sorte que l'outil de nettoyage dirige le fluide de nettoyage depuis le bras de distribution de liquide de polissage vers une surface de l'enceinte du bras de distribution de liquide de polissage.