VACUUM TREATMENT APPARATUS

So as to perform a vacuum surface treatment on a workpiece at a predetermined temperature, which is different from a temperature to which the surface is exposed during the vacuum surface treatment, the workpiece is conveyed in a conveyance direction (W) along one or more than one station group (11)...

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Bibliographische Detailangaben
Hauptverfasser:	BENZ, Rico, MATTEACCI, Pierre, PATSCHEIDER, Jörg, ZORZI, Daniele, VOSER, Stephan, STEINKELLER, Josef, DÜTSCHLER, Martin
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	So as to perform a vacuum surface treatment on a workpiece at a predetermined temperature, which is different from a temperature to which the surface is exposed during the vacuum surface treatment, the workpiece is conveyed in a conveyance direction (W) along one or more than one station group (11) consisting of one or more than one tempering station (13) and of a single treatment station (15). De façon à effectuer un traitement de surface sous vide sur une pièce à travailler à une température prédéterminée, qui est différente d'une température à laquelle la surface est exposée pendant le traitement de surface sous vide, la pièce à travailler est transportée dans une direction de transport (W) le long d'au moins un groupe de stations (11) consistant en un ou plusieurs postes de trempe (13) et en un seul poste de traitement (15).