EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE

This extreme ultraviolet light source device comprises: a cathode; an anode; a power supply device; a first support structure that is metal and that supports the cathode; and a second support structure that is metal and that supports the anode. The power supply device causes an electrical discharge...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	URAKAMI Hideyuki, MORIMOTO Shunichi
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS X-RAY TECHNIQUE
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