FRAME FOR VAPOR DEPOSITION MASKS, FRAME-ATTACHED VAPOR DEPOSITION MASK, AND VAPOR DEPOSITION METHOD

Provided is a frame for vapor deposition masks, which is lightweight, has high stiffness, and rarely undergoes the generation of an out gas. The frame (50) for vapor deposition masks according to one embodiment is provided with a frame main body (51) which is so configured as to hold a vapor deposit...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	WAKABAYASHI, Tadashi, NOMOTO, Masashi
Format:	Patent
Sprache:	eng ; fre ; jpn
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	Provided is a frame for vapor deposition masks, which is lightweight, has high stiffness, and rarely undergoes the generation of an out gas. The frame (50) for vapor deposition masks according to one embodiment is provided with a frame main body (51) which is so configured as to hold a vapor deposition mask. In the frame main body, each of a base material and a reinforcing material comprises a composite material composed of an inorganic solid material. L'invention concerne un cadre pour masques de dépôt en phase vapeur, qui est léger, présente une rigidité élevée et n'est que rarement soumis à la génération d'un gaz extérieur. Le cadre (50) pour masques de dépôt en phase vapeur selon un mode de réalisation est pourvu d'un corps principal de cadre (51) qui est conçu de façon à maintenir un masque de dépôt en phase vapeur. Dans le corps principal de cadre, chaque matériau parmi un matériau de base et un matériau de renforcement comprend un matériau composite composé d'un matériau inorganique solide. 軽量で高い剛性を有し、且つアウトガスの発生が抑制される蒸着マスク用フレームを提供する。一実施形態の蒸着マスク用フレーム（５０）は、蒸着マスクを保持するように構成されたフレーム本体（５１）を備える。フレーム本体は、基材及び強化材のいずれもが無機固体材料により構成される複合材である。