MAGNETIC STRUCTURE IN SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE

Disclosed are a magnetic structure in a semiconductor device, and the semiconductor device. The magnetic structure is arranged outside a reaction chamber of the semiconductor device in a surrounding manner, and comprises: an annular support member, a plurality of angle adjustment assemblies, and a p...

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1. Verfasser: YU, Zhenduo
Format: Patent
Sprache:chi ; eng ; fre
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Zusammenfassung:Disclosed are a magnetic structure in a semiconductor device, and the semiconductor device. The magnetic structure is arranged outside a reaction chamber of the semiconductor device in a surrounding manner, and comprises: an annular support member, a plurality of angle adjustment assemblies, and a plurality of magnetic members, wherein the annular support member is arranged surrounding the reaction chamber of the semiconductor device; the plurality of angle adjustment assemblies are connected to the annular support member and are distributed in the circumferential direction of the annular support member; the magnetic members are correspondingly connected to the angle adjustment assemblies on a one-to-one basis; and each of the angle adjustment assemblies can fix the corresponding magnetic member on the annular support member and is used for adjusting the direction of the magnetic line of force of the magnetic member and the included angle between the magnetic line of force of the magnetic member and the axis